HAXPES reference spectra of Si, SiO2, SiN, SiC, and poly(dimethyl siloxane) with Cr <i>Kα</i> excitation
نویسندگان
چکیده
Monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on silicon, silicon dioxide, nitride, carbide, poly(dimethyl siloxane) samples. Survey data, high-resolution scans of all observed photoelectron peaks, lines are presented herein.
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ژورنال
عنوان ژورنال: Surface Science Spectra
سال: 2023
ISSN: ['1055-5269', '1520-8575']
DOI: https://doi.org/10.1116/6.0002660